Capacitive-type humidity sensors fabricated using the offset lithographic printing process
Abstract
This paper reports on the fabrication of a novel capacitive-type relative humidity sensor of which the electrode films are deposited using the high speed printing process, offset lithography. Parallel-plate capacitor sensor structures have been formed with a number of humidity sensitive polymers including polyimide and polyethersulphone (PES). Details of the fabrication process and sensor characteristics such as linearity, sensitivity and response time are included.
- Publication:
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Sensors and Actuators B: Chemical
- Pub Date:
- January 2002
- DOI:
- Bibcode:
- 2002SeAcB..87..226H
- Keywords:
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- Humidity sensors;
- Capacitive-type sensors;
- Conductive lithographic film (CLF);
- Relative humidity